Experimental investigation of discharge characteristics of a surface-wave-produced planar plasma

Electrical Engineering in Japan (English translation of Denki Gakkai Ronbunshi)

Volumn 138, Issue 3, 2002, Pages 9-18

  Murakami, Yoshinobu ^a   Mitsumoto, Shinichi ^b   Fukuma, Masumi ^c   Hozumi, Naohiro ^a   Nagao, Masayuki ^a  

^a TOYOHASHI UNIVERSITY OF TECHNOLOGY   (Japan)

^b UBE NATIONAL COLLEGE OF TECHNOLOGY   (Japan)

^c MATSUE NATIONAL COLLEGE OF TECHNOLOGY   (Japan)

Author keywords

Dielectric plate; Planar plasma; Surface wave; Upper plate

Indexed keywords

DIELECTRIC WAVEGUIDES; ELECTRIC FIELD EFFECTS; ENERGY TRANSFER; SURFACE WAVES;

SURFACE WAVE PRODUCED PLASMAS (SWP);

PLASMA DEVICES;

EID: 0036468827     PISSN: 04247760     EISSN: None     Source Type: Journal    
DOI: 10.1002/eej.1123     Document Type: Article

References (8)

1. Resist ashing using surface-wave-produced plasmas
2. Affecting factors on surface-wave-produced plasmas
3. Electric field in surface-wave-produced plasmas
4. Numerical investigation on uniformity improvement of the microwave power absorption in a planar type surface wave plasma processing device
5. Relation between the shape of a dielectric window and the stability of discharges in a microwave-produced plasma