Optoelectronic properties of microcrystalline silicon films

Thin Solid Films

Volumn 403-404, Issue , 2002, Pages 526-529

  Wunsch F ^a   Citarella, G ^a   Kunst, M ^a  

^a HAHN MEITNER INSTITUT   (Germany)

Author keywords

Microcrystalline silicon; Mobility; Transient photoconductivity

Indexed keywords

ANNEALING; DOPING (ADDITIVES); IMPURITIES; OPTOELECTRONIC DEVICES; PHOTOCONDUCTIVITY; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SILICON; SUBSTRATES;

MICROCRYSTALLINE SILICON FILMS;

THIN FILMS;

EID: 0036467937     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(01)01665-0     Document Type: Conference Paper

References (5)