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Volumn 44, Issue 2, 2002, Pages 331-344
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Roles of temperature and humidity in the oxidation of sputter-deposited Cu-Ta alloys in air
a
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Author keywords
AES; Alloy; Amorphous structure; Atmospheric corrosion; Sputtered films
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Indexed keywords
ATMOSPHERIC HUMIDITY;
BINARY ALLOYS;
CORROSION RESISTANT ALLOYS;
DIFFUSION;
OXIDATION;
SPUTTER DEPOSITION;
TANTALUM ALLOYS;
THERMAL EFFECTS;
SPUTTER-DEPOSITED ALLOYS;
COPPER ALLOYS;
ATMOSPHERIC CORROSION;
CORROSION PROTECTION;
FILM;
SPUTTERING;
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EID: 0036467009
PISSN: 0010938X
EISSN: None
Source Type: Journal
DOI: 10.1016/S0010-938X(01)00064-6 Document Type: Article |
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Times cited : (11)
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References (11)
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