Residual stress change by thermal annealing in amorphous Sm-Fe-B thin films

Journal of Magnetism and Magnetic Materials

Volumn 239, Issue 1-3, 2002, Pages 570-572

  Na, S M ^a   Suh, S J ^a   Kim, H J ^b   Lim, S H ^b  

^a Sungkyunkwan University   (South Korea)

^b Korea Institute of Science and Technology   (South Korea)

Author keywords

Giant magnetostriction; Magnetoelastic anisotropy; Residual stress; Thermal annealing; Thin films

Indexed keywords

AMORPHOUS FILMS; ANNEALING; BENDING (DEFORMATION); COMPRESSIVE STRESS; MAGNETIC ANISOTROPY; MAGNETOSTRICTION; RESIDUAL STRESSES; SAMARIUM COMPOUNDS; SPUTTERING; SUBSTRATES; TENSILE STRESS; THERMAL EXPANSION;

GIANT MAGNETOSTRICTION; MAGNETOELASTIC ANISOTROPY;

THIN FILMS;

EID: 0036465325     PISSN: 03048853     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0304-8853(01)00668-0     Document Type: Article

References (4)