Polymer waveguide optical interconnections on Si CMOS circuits

Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest

Volumn , Issue , 2002, Pages 161-

  Cho, Sang Yeon ^a   Thomas, Mikkel ^a   Kim, Dae Ik ^a   Jokerst, Nan Marie ^a   Brooke, Martin ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANALOG TO DIGITAL CONVERSION; CLADDING (COATING); CMOS INTEGRATED CIRCUITS; HELIUM NEON LASERS; INDUCTIVELY COUPLED PLASMA; MASKS; OPTICAL WAVEGUIDES; ORGANIC POLYMERS; PHOTODETECTORS; REACTIVE ION ETCHING; SEMICONDUCTING SILICON; SILICA; SPIN COATING;

POLYMER OPTICAL WAVEGUIDES;

OPTICAL INTERCONNECTS;

EID: 0036457271     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)

1. Yujie Liu, et al., "Optoelectronic Integration of Polymer Waveguide Array and Metal-Semiconductor-Metal Photodetector Through Micromirror Couplers," IEEE Photonics Technology Letters, vol. 13, no. 4, pp. 355-357, April 2001.
2. J.W. Goodman, et al., "Optical interconnections for VLSI systems," Proc. IEEE, vol. 72, pp. 850-866, July 1984.
3. François Gouin, et al., "A 4 × 4 optoelectronic switch matrix integrating an MSM array with polyimide optical waveguides" SPIE, Vol. 3290, pp. 287-295, 1997.
4. Lucie Robitaille, et al., "Integration of optoelectronic switch matrices using metal-semiconductor-metal photodetectors and polyimide waveguide circuitry," Optical Engineering, vol. 37, pp. 1157-1163, April 1998.