Design guidelines and manufacturing methods for microreaction devices

Chimia

Volumn 56, Issue 11, 2002, Pages 598-604

  Ehrfeld, Wolfgang ^a  

^a Ehrfeld Mikrotechnik AG   (Germany)

Author keywords

Microfabrication; Microreactors; Process intensification; Unit operation modules

Indexed keywords

BIOSAFETY; CHEMICAL INDUSTRY; CHEMICAL PROCEDURES; CHEMICAL REACTION; DEVICE; LASER; MOLECULAR DYNAMICS; REVIEW; TECHNIQUE; TECHNOLOGY;

EID: 0036457118     PISSN: 00094293     EISSN: None     Source Type: Journal    
DOI: 10.2533/000942902777680045     Document Type: Review

References (26)

1. W. Ehrfeld, U. Ehrfeld, S. Kiesewalter, 'Progress and profit through microtechnologies', Proc. VDE World Microtechnologies Congress, MICRO.tec 2000, vol. 1, 2000, p. 9-17.
2. Market analysis for micro systems II, 2000-2005, A NEXUS Task Force Report, 2002.
3. Bundesministerium für Bildung und Forschung: Förderkonzept Mikrosystemtechnik 2000+, Bonn, 2000.
4. W. Ehrfeld, V. Hessel, V. Haverkamp, 'Microreactors', Ullmann's Encyclopedia of Industrial Chemistry, 6th Ed, Wiley-VCH, Weinheim, 1999.
5. K. Schubert, W. Bier, G. Linder, D. Seidel, 'Herstellung und test von kompakten mikrowärmeübertragern', Chem.-Ing.-Tech. 1989, 61. 172-173.
6. G. Wiessmeier, K. Schubert, D. Hönicke, 'Monolithic microreactors possessing regular mesopore systems for the successful performance of heterogeneously catalysed reactions', in Proc. 1st Int. Conf. Microreaction Technology, Ed. W. Ehrfeld, Springer-Verlag, Berlin, Heidelberg, New York, 1998, p. 20-26.
7. K.F. Jensen, I-Ming Hsing, R. Srinivasan, M.A. Schmidt, M.P. Harold, J.J. Lerou, J.F. Ryley, 'Reaction engineering for microreactor systems', in Proc. 1st Int. Conf. Microreaction Technology, Ed. W. Ehrfeld, Springer-Verlag, Berlin, Heidelberg, New York, 1998, p. 2-9.
8. K.-P. Jäckel, 'Microreaction technology - Vision and reality', Plenary Lecture, ACHEMA 2000, Frankfurt, 2000.
9. A.I. Stankiewicz, J.A. Moulijn, 'Process intensification: Transforming chemical engineering', Chemical Engineering Progress 2000, 96, 22-33.
10. A. Green, B. Johnson, A. John, 'Process intensification magnifies profits', Chemical Engineering Dec. 1999, p. 66-73.
11. M. Wood, A. Green, 'A methodological approach to process intensification', IchemE Symposium Series No. 144, 1998, p. 405-416.
12. W. Ehrfeld, U. Ehrfeld, 'Microfabrication for process intensification', in Proc. 5th Int. Conf. Microreaction Technology, Eds. M. Matlosz, W. Ehrfeld, J.P. Baselt, Springer-Verlag, Berlin, Heidelberg, New York, 2001, p. 3-129.
13. B. Jandeleit, D.J. Schaefer, T.S. Powers, H.W. Turner, W.H. Weinberg, 'Combinatorial materials science and catalysis', Angew. Chemie, Int. Ed. 1999, 38, 2494-2532.
14. P. Claus, D. Hönicke, T. Zech, 'Miniaturization of screening devices for the combinatorial development of heterogeneous catalysts', Catalysis Today 2001, 67, 319-339.
15. J. Mayer, M. Fichtner, D. Wolf, K. Schubert, 'A microstructured reactor for the catalytic partial oxidation of methane to syngas', in Proc. 3rd Int. Conf. Microreaction Technology, Ed. W. Ehrfeld, Springer-Verlag, Berlin, Heidelberg, New York, 2000, p. 187-196.
16. H. Löwe, W. Ehrfeld, V. Hessel, T. Richter, J. Schiewe, 'Micromixing technology', Proc. 4th Int. Conf. Microreaction Technology, AIChE Spring National Meeting, Atlanta, GA, 2000.
17. 2 reaction in the explosion regime', Proc. 2nd Int. Conf. Microreaction Technology, p. 81-87, AIChE Spring Meeting, New Orleans, LA, 1998.
18. W. Ehrfeld, D. Münchmeyer, 'Three-dimensional microfabrication using synchrotron radiation', Nucl. Inst. Meth. Phys. Res. 1991, A303, 523-531.
19. M. Koehler, 'Ätztechniken', in 'Handbuch Mikrotechnik', Ed. W. Ehrfeld, Carl Hanser Verlag, München, 2001, p. 279-322.
20. A. Freitag, T.R. Dietrich, R. Scholz, 'Glass as a material for microreaction technology', Proc. 4th Int. Conf. Microreaction Technology, p. 48-54, AIChE Spring National Meeting, Atlanta, GA, 2000.
21. I. W. Rangelow, R. Kassing, 'Silicon microreactors made by reactive ion etching', Proc. 1st Int. Conf. Microreaction Technology, Springer-Verlag, Berlin, Heidelberg, New York, 1998, p. 169-174.
22. F. Laermer, A. Schilp (Robert Bosch GmbH), 'Method of Anisotropically Etching Silicon', US Patent No. 5501893, 1996.
23. M. Weck, 'Ultraprecision machining of microcomponents', in Proc. Int. Seminar on Precision Engineering and Microtechnology, Ed. M. Weck, Aachen, 2000.
24. F. Michel, W. Ehrfeld, O. Koch, H.-P. Gruber, 'EDM for microfabrication - Technology and applications', in: Proc. Int. Seminar on Precision Engineering and Microtechnology Ed. M. Weck, Aachen, 2000.
25. A. Gillner, T. Klotzbücher, 'Lasermikrobearbeitung', in 'Handbuch Mikrotechnik', Ed. W. Ehrfeld, Carl Hanser Verlag, München, 2001, p. 105-143.
26. E. Bremus, A. Gillner, D. Hellrung, H. Höcker, F. Legewie, R. Poprawe, M. Wehner, M. Wild, 'Laser processing for manufacturing microfluidic devices', Proc. 3rd Int. Conf. Microreaction Technology, Springer-Verlag, Berlin, Heidelberg, New York, 2000, p. 187-196.