Laser CVD system design, operation, and modeling

Ceramic Engineering and Science Proceedings

Volumn 23, Issue 4, 2002, Pages 23-33

  Lackey, W Jack ^a   Rosen, David ^a   Duty, Chad ^a   Jean, Daniel ^a   Bondi, Scott ^a   Elkhatib, Tarek ^a   Johnson, Ryan ^a   Jiang, Ming Xuan ^a   Mi, Jian ^a   Gillespie, Josh ^a   Harvey, Racheal ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; FLOW OF FLUIDS; HEAT TRANSFER; LASER APPLICATIONS; MASS TRANSFER; MATHEMATICAL MODELS; OPTIMIZATION; PROCESS ENGINEERING; REACTION KINETICS; TEMPERATURE CONTROL; THERMODYNAMIC PROPERTIES;

EXTENSIVE MODELING; LASER CHEMICAL VAPOR DEPOSITION SYSTEM; THREE DIMENSIONAL MULTI-LAYER STRUCTURES;

CERAMIC MATERIALS;

EID: 0036455165     PISSN: 01966219     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (20)

1. C. Duty, D. Jean and W.J. Lackey, "Laser Chemical Vapor Deposition: Materials, Modeling, and Process Control," accepted for publication in Int. Mater. Rev. in May 2001.
2. K. Williams, N. Jaikumar, G. Saiprasanna, M. Hegler, and J. Maxwell. "The Laser Microchemical Lathe: Rapid Freeform Part Fabrication from the Vapor Phase," Proceedings of the Solid Freeform Fabrications Symposium, Austin, TX, 543-551, 1999.
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7. S. Park and S. Lee, "Growth Kinetics of Microscopic Silicon Rods Grown on Silicon Substrates by the Pyrolytic Laser-Induced CVD Process," Japn. J. Appl. Phys., 29 (1), L129-L132, 1990.
8. J. Maxwell, "Three-Dimensional Laser-Induced Pyrolysis: Modeling, Growth Rate Coontrol, and Application to Micro-Scale Prototyping," Ph.D. Dissertation, Rensselaer Polytechnie Institute, 1996.
9. N. Arnold, E. Thor, N. Kirichenko, and D. Bauerle, "Pyrolytic LCVD of Fibers: A Theoretical Description," 62, 503-508, 1996.
10. W. Steen, "Surface Coating Using a Laser," Lett Heat Mass Trans, 4, 167-178, 1977.
11. C. Duty, B. Fuhrman, D. Jean, and W. J. Lackey, "Heat Transfer Analysis of a Gas-Jet Laser CVD Process," Proceedings of the Solid Freeform Fabrication Symposium, Austin, TX, 461-468, 2000.
12. C. Duty, R. Johnson, D. Jean, S. Bondi, and W.J. Lackey, "Thermal, Fluid, and Mass Transport Modeling of a Gas-Jet Reagent Delivery System for Laser CVD," Proceedings of the Solid Freeform Fabrication Symposium, Austin, TX, 373-380, August 2001.
13. Y. Zhang and A. Fahri, "Thermal Modeling of Selective Area Laser Deposition of Titanium Nitride on a Finite Slab with Stationary and Moving Laser Beams," Int. J. Heat Mass Trans., 43, 3835-3846, 2000.
14. D. Jean, C. Duty, B. Fuhrman, and W.J. Lackey, "Precision LCVD System Design with Real Time Process Control," Proc. of the Solid Freeform Fabrication Symposium, Austin, TX, 59-65, 1999.
15. D. Jean C. Duty, B. Fuhrman, and W.J. Lackey, "Precision Carbon Deposition Using Pyrolytic Laser Chemical Vapor Deposition (LCVD)," Proceedings of the Solid Freeform Fabrication Symposium, Austin, TX, 73-79, 2000.
16. B. Fuhrman, "Fabrication of Advanced Thermionic Emitters Using Laser Chemical Vapor Deposition-Rapid Prototyping," Master's Thesis, Georgia Institute of Technology, August 2000.
17. B. Fuhrman, C. Duty, D. Jean, and W. J. Lackey, "Fabrication of Advanced Thermionic Emitters Using Laser Chemical Vapor Deposition-Rapid Prototyping," Proceedings of the Solid Freeform Fabrication Symposium, 498-505, 2000.
18. R. Johnson, S. Bondi, D. Jean, C. Duty, M. Jiang and W. J. Lackey, "Fabrication of Multi-Layered Carbon Structures Using LCVD," Proceedings of the Solid Freeform Fabrication Symposium, Austin, TX, 61-68, August 2001.
19. D. Jean, "Design and Operation of an Advanced Laser Chemical Vapor Deposition System with On-Line Control," Ph.D. Dissertation, Georgia Institute of Technology, June 2001.
20. D. Jean, C. Duty, R. Johnson, S. Bondi, and W. J. Lackey, "Carbon Fiber Growth Kinetics and Thermodynamics Using Temperature Controlled LCVD," accepted for publication in Carbon, September 2001.