Low contact force probing on copper electrodes

IEEE International Test Conference (TC)

Volumn , Issue , 2002, Pages 424-429

  Kataoka, Kenichi ^a   Itoh, Toshihiro ^a   Okumura, Katsuya ^a   Suga, Tadatomo ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; COPPER; ELECTRIC BREAKDOWN; ELECTRIC RESISTANCE MEASUREMENT; ELECTRODES; FORCE MEASUREMENT; MICROELECTROMECHANICAL DEVICES; PROBES;

CONTACT FORCE PROBING; DEOXIDATION; PROBE CARD;

INTEGRATED CIRCUIT TESTING;

EID: 0036443087     PISSN: 10893539     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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