Homogeneity of langasite and langatate wafers

Proceedings of the Annual IEEE International Frequency Control Symposium

Volumn , Issue , 2002, Pages 311-319

  Fachberger, R ^a,b   Riha, E ^b   Born, E ^c   Ruile, W ^b   Pongratz, P ^a   Kronholz, S ^d  

^a VIENNA UNIVERSITY OF TECHNOLOGY   (Austria)

^b EPCOS AG   (Germany)

^c TECHNICAL UNIVERSITY OF MUNICH   (Germany)

^d ILMENAU UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL DEFECTS; CRYSTAL GROWTH; CRYSTAL RESONATORS; CRYSTALS; IMAGING TECHNIQUES; NATURAL FREQUENCIES; SILICON WAFERS; TOMOGRAPHY; X RAY ANALYSIS;

LANGATATE WAFERS;

ACOUSTIC SURFACE WAVE DEVICES;

EID: 0036442669     PISSN: 01616404     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (13)

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