Frequency-temperature characteristics of stepped bi-mesa-shaped at-cut quartz resonators

Proceedings of the Annual IEEE International Frequency Control Symposium

Volumn , Issue , 2002, Pages 91-95

  Goka, S ^a   Sekimoto, H ^a   Watanabe, Y ^a   Sato, T ^a  

^a TOKYO METROPOLITAN UNIVERSITY   (Japan)

Author keywords

Decoupling effect; Energy trapping effect; Mesa; Mode coupling; Stepped mesa

Indexed keywords

FABRICATION; FINITE ELEMENT METHOD; NATURAL FREQUENCIES; QUARTZ;

ENERGY TRAPPING EFFECT;

CRYSTAL RESONATORS;

EID: 0036442608     PISSN: 01616404     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)

1. M. Onoe and M. Okazaki, "Miniature AT-Cut Strip Resonators with Tilted Edges," Proc. Int. Frequency Control Symp. (1975) p. 42.
2. H. Bahadur and R. Parshad: Physical Acoustics, eds. W.P. Mason and R.N. Thurston (Academic Press, New York, 1982) Vol. 16, Chap. 2, p.37.
3. S. Goka, H. Sekimoto and Y. Watanabe, "Experimental Study of Vibrations of Mesa-Shaped AT-Cut Quartz Plates," Proc. Int. Frequency Control Symp. (1999) p. 441.
4. S. Goka, H. Sekimoto and Y. Watanabe, "Frequency-Temperature Behavior of Bi-mesa Shaped AT-Cut Quartz Resonators," Proc. Int. Frequency Control Symp. (2001) p. 643.
5. S. Goka, A. Ishizaki, Sekimoto and Y. Watanabe, "Effect of Stepped Bi-mesa Structures on Spurious Vibrations of AT-cut Quartz Plates," Jpn. J. Appl. Phys. 39 (2000) 3054.
6. R.W. Ward, "Etching of Quartz Crystal Spheres," Proc. Int. Frequency Control Symp. (1993) p. 390.
7. R.F. Milson, D.T. Elliott and M. Redwood, "Three-Dimensional Mode-Matching Theory of Rectangular Bar Resonators Using Complex Wave-Numbers," Proc. Int. Frequency Control Symp. (1981) p.174.
8. A. Ballato, "Frequency-Temperature-load Capacitance Behavior of Resonators for TCXO Application," IEEE Trans. Sonics & Ultrason. SU-25 (1978) No. 4, July (1978) 185.
9. R.J. Williamson, "Non-Destructive Means for Determining Mode Shape in Thickness-Shear Resonators," Proc. Int. Frequency Control Symp. (1990) p. 424.
10. Y. Watanabe, H. Sekimoto and Y. Oomura, "Laser-Diode-Based Mode-Shape Measurement System for Very-High-Frequency Quartz Resonators," Jpn. J. Appl. Phys. 34 (1995) 216.