Love mode SAW sensors with ZnO layer operating in gas and liquid media

Proceedings of the Annual IEEE International Frequency Control Symposium

Volumn , Issue , 2002, Pages 268-272

  Kalantar Zadeh, Kourosh ^a,b   Wlodarski, Wojtek ^a,b   Trinchi, Adrian ^a,b   Holland, Anthony ^a   Galatsis, Kosmas ^a,b  

^a RMIT UNIVERSITY   (Australia)

^b CRC for Microtechnology   (Australia)

Author keywords

Gas; Immunosensor; Layer; SAW; Sensor; ZnO

Indexed keywords

CRYSTAL STRUCTURE; IMMUNOSENSORS; NITROGEN; OXYGEN; QUARTZ; ZINC OXIDE;

QUARTZ CRYSTAL STRUCTURE;

ACOUSTIC SURFACE WAVE DEVICES;

EID: 0036439825     PISSN: 01616404     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (18)

1. R.M. White, F.W. Voltmer, "Direct Piezoelectric Coupling to Surface Elastic Waves," Appl. Phys. Lett., vol. 17, pp. 314-316, 1965.
2. C.K. Campbell, Surface Acoustic Wave Devices for Mobile and Wireless Communications, Academic Press, USA, 1998.
3. A.A. Oliner (ed.), Topics in Applied Physics: Acoustic, Surface Waves, Springer-Verlag, New York, 1978.
4. D.P. Morgan, "History of SAW Devices," IEEE International Frequency Control Symposium, Los Angeles, California, USA, pp. 439-460, 1998.
5. B. Drafts, "Acoustic Wave Technology," IEEE Trans. on Microwave Theory and Techniques, vol. 49, no. 4, pp. 795-802, 2001.
6. J.W. Gray, S.J., Martin, R.M. White, "Acoustic Wave Microsensors: Part I," Analytical Chemistry, vol. 65, no. 21, pp. 940-948, 1993.
7. H. Wohltjen and R. Dessy, "Surface Acoustic Wave Probe for Chemical Analysis I: Introduction and Instrument Design," Anal. Chem., vol. 51, pp. 1458-1475, 1979.
8. K. Kalantar-zadeh, W. Wlodarski, K. Galatsis, "Love Mode Layered Surface Acoustic Wave Filters," Electronics Letters, vol. 37, no. 12, pp. 802-803, 2001.
9. K. Kalantar-Zadeh, A. Trinchi, W. Wlodarski, A. Holland, "A Novel Love Mode Device Based on A ZnO/ST-cut Quartz Crystal Structure For Sensing Applications," Sensors and Actuators A, in press.
10. G.L. Harding, J. Du, P.R. Dencher, D. Barnett, and E. Howe, "Love Wave Acoustic Immunosensor Operating in Liquid," Sensors and Actuators A, vol. 61, pp. 279-286, 1997.
11. B. Jakoby, M.J. Vellekoop, "Analysis and Optimization of Love Wave Liquid Sensors," IEEE Trans. Ultrasonics, Ferroelectr. Freq. Control, vol. 45, pp. 1293-1301, 1998.
12. J. Du, G.L. Harding, J.A. Ogilvy, P.R. Dencher, and M. Lake, "A Study of Love-Wave Acoustic Sensors", Sensors and Actuators A, vol. 56, pp. 211-219, 1996.
13. F.S. Hickernell, "Zinc Oxide Films for Acoustoelectric Device Applications," IEEE Transactions on Sonics and Ultrasonics, vol. SU-32, pp. 621-629, 1985.
14. F.C.M. Van De Pol, "Thin-Film ZnO - Properties and Applications," Ceramic Bulletin, vol. 69, pp. 1959-1965, 1990.
15. R. Lec, J.F. Vetelino, R.S. Falconer, and Z. Xu, "Macroscopic Theory of Surface Acoustic Wave Gas Mierosensors," proceedings of 1988 IEEE Ultrasonics Symposium, pp. 585-589, 1988.
16. Z. Wang and J.D.N. Cheeke, "Sensitivity Analysis for Love Mode Acoustic Gravimetric Sensors," Appl. Phys. Lett., vol. 64, no. 22, pp. 2940-2942, 1994.
17. K. Wasa and S. Hayakawa, Handbook of Sputter Deposition Technology, Noyes Publications, Park Ridge, New Jersey, USA, 1995.
18. U. Wolf, F.L. Dickert, G.K. Fischrauer, W. Greibl, and C.C.W. Ruppel, "SAW Sensors for Harsh Environments," IEEE Sensors Journal, vol. 1, pp. 4-13, 2001.