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Volumn , Issue , 2002, Pages 220-224
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Low cost thin film based surface acoustic wave vibration sensors for vibrational gyroscope
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Author keywords
Piezoelectric; SAW; Sensor
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Indexed keywords
FREQUENCIES;
GLOBAL POSITIONING SYSTEM;
GYROSCOPES;
PIEZOELECTRIC DEVICES;
POLYCRYSTALLINE MATERIALS;
RESONATORS;
STRAIN MEASUREMENT;
THIN FILMS;
VIBRATIONS (MECHANICAL);
VIBRATION SENSORS;
ACOUSTIC SURFACE WAVE DEVICES;
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EID: 0036438170
PISSN: 01616404
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (5)
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References (6)
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