Generalized acoustic parameters of non-homogeneous thin films

Proceedings of the Annual IEEE International Frequency Control Symposium

Volumn , Issue , 2002, Pages 234-241

  Lucklum, Ralf ^a   Hauptmann, Peter ^a  

^a OTTO VON GUERICKE UNIVERSITY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC IMPEDANCE; ACOUSTIC WAVE PROPAGATION; CRYSTALS; MULTILAYERS; PIEZOELECTRIC MATERIALS; QUARTZ; VISCOSITY;

QUARTZ CRYSTAL MICROBALANCE (QCM);

THIN FILMS;

EID: 0036438091     PISSN: 01616404     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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