X-ray generation from fs laser heated Xe clusters

Applied Surface Science

Volumn 197-198, Issue , 2002, Pages 138-144

  Kondo, K ^a   Mori, M ^a   Shiraishi, T ^a  

^a UNIVERSITY OF TSUKUBA   (Japan)

Author keywords

Cluster; EUV lithography; Laser plasma; Optical high field; Soft X ray generation; Ultrashort high peak power laser

Indexed keywords

ENERGY EFFICIENCY; INTERFACIAL ENERGY; LASER PRODUCED PLASMAS; LASER PULSES; PHOTOLITHOGRAPHY; XENON;

SOFT X-RAY GENERATION;

X RAY PRODUCTION;

EID: 0036427949     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(02)00317-3     Document Type: Conference Paper

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