|
Volumn 4773, Issue , 2002, Pages 63-73
|
Design considerations for fast steering mirrors (FSMs)
a a a a |
Author keywords
DSP; Flexure; FSM; Hysteresis; Linearity; Metal mirrors; PZT; Servo; Virtual pivot; Voice coil actuator
|
Indexed keywords
ACTUATORS;
ERROR CORRECTION;
FEEDBACK CONTROL;
HYSTERESIS;
INTERFEROMETERS;
MIRRORS;
PIEZOELECTRIC DEVICES;
SPRINGS (COMPONENTS);
FAST STEERING MIRRORS (FSM);
SCANNING;
|
EID: 0036425074
PISSN: 0277786X
EISSN: None
Source Type: Journal
DOI: 10.1117/12.469197 Document Type: Article |
Times cited : (60)
|
References (2)
|