Characterization of shape and deformation of MEMS by quantitative opto-electronic metrology techniques

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4778, Issue , 2002, Pages 1-10

  Furlong, Cosme ^a   Pryputniewicz, Ryszard J ^a  

^a Worcester Polytechnic Institute   (United States)

Author keywords

Computer aided design and optimization; Measurement accuracy and precision; MEMS characterization; Opto electronic metrology techniques; Shape and deformation measurements

Indexed keywords

COMPUTER AIDED DESIGN; IMAGE ANALYSIS; INTERFEROMETRY; MICROMETERS; OPTICAL RESOLVING POWER; OPTICAL VARIABLES MEASUREMENT; OPTOELECTRONIC DEVICES; PHOTONS;

OPTO-ELECTRONIC METROLOGY;

MICROELECTROMECHANICAL DEVICES;

EID: 0036421551     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.473551     Document Type: Conference Paper

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