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Volumn 31, Issue 4, 2002, Pages 263-274
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ULSI gap filling with a thin CVD SiO2-based insulator: A review
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Author keywords
[No Author keywords available]
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Indexed keywords
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EID: 0036420141
PISSN: 05441269
EISSN: None
Source Type: Journal
DOI: None Document Type: Article |
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Times cited : (6)
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References (0)
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