Pulsed laser deposition of adherent hexagonal/cubic boron nitride layer systems at high growth rates

Applied Surface Science

Volumn 197-198, Issue , 2002, Pages 331-337

  Weißmantel, Steffen ^a   Reiße, Günter ^a  

^a UNIVERSITY OF APPLIED SCIENCES MITTWEIDA   (Germany)

Author keywords

Adhesion; Cubic boron nitride (c BN); Mechanical properties; Microstructure; Nitrides; Pulsed laser deposition

Indexed keywords

ADHESION; EXCIMER LASERS; FILM GROWTH; FILM PREPARATION; HARDNESS; ION BEAM ASSISTED DEPOSITION; ION BEAMS; KINETIC ENERGY; MICROSTRUCTURE; PULSED LASER DEPOSITION; STRESS ANALYSIS; THICK FILMS;

LASER ENERGY DENSITIES;

CUBIC BORON NITRIDE;

EID: 0036419989     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(02)00392-6     Document Type: Conference Paper

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