Alternating grazing incidence dark field scanning optical microscopy for dimensional measurements

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4777, Issue , 2002, Pages 352-361

  Bodermann, B ^a   Michaelis, W ^a   Diener, A ^a   Mirande W ^a  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

Author keywords

CD measurements; Microscopy; Proximity effect

Indexed keywords

ELECTROMAGNETIC WAVE DIFFRACTION; LIGHT POLARIZATION; LIGHT REFLECTION; LIGHTING; MASKS; MICROSTRUCTURE; OPTICAL MICROSCOPY; OPTICAL RESOLVING POWER; PARAMETER ESTIMATION; SCANNING;

DARK FIELD SCANNING OPTICAL MICROSCOPY;

INTERFEROMETRY;

EID: 0036417257     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.472235     Document Type: Conference Paper

References (4)

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