Some metrological issues in optical full field techniques

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4777, Issue , 2002, Pages 220-231

  Surrel, Yves ^a  

^a Bioinformatique et Chimie Moléculaire   (France)

Author keywords

Accuracy; Metrology; Phase error; Resolution; Sensitivity; Spatial resolution; Uncertainty

Indexed keywords

DATA REDUCTION; IMAGE ANALYSIS; INTERFEROMETRY; OPTICAL RESOLVING POWER; PHASE SHIFT; SENSITIVITY ANALYSIS;

OPTICAL FULL-FIELD MEASUREMENT TECHNIQUES (OFFMT); SHAPE MEASUREMENT;

MEASUREMENT THEORY;

EID: 0036417254     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.472222     Document Type: Conference Paper

References (9)

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