Microfabrication of fiber optic scanners

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4773, Issue , 2002, Pages 102-110

  Fauver, Mark ^a   Crossman Bosworth, Janet ^a   Seibel, Eric J ^a  

^a UNIVERSITY OF WASHINGTON   (United States)

Author keywords

Integrated optics; Micro fabrication; Micro optics; Micromechanical resonators; Op tical scanning; Optical fibers

Indexed keywords

ACTUATORS; ENDOSCOPY; FABRICATION; FIBER OPTICS; FREQUENCIES; INTEGRATED OPTICS; LENSES; MICROMACHINING; MICROOPTICS; SINGLE MODE FIBERS;

MICROMECHANICAL RESONATORS;

SCANNING;

EID: 0036416806     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.469190     Document Type: Conference Paper

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