Assessment of different simplified resist models

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4691 II, Issue , 2002, Pages 1266-1277

  Fuard, D ^a   Besacier, M ^a   Schiavone, P ^a  

^a CEA GRENOBLE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; CONVOLUTION; IMAGE ANALYSIS; MATHEMATICAL MODELS; SPURIOUS SIGNAL NOISE;

AERIAL IMAGES;

PHOTORESISTS;

EID: 0036414478     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.474507     Document Type: Conference Paper

References (11)

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