FIB preparation of mesa structures for SIMS analysis

Microscopy and Microanalysis

Volumn 8, Issue SUPPL. 2, 2002, Pages 542-543

  McKinley, J M ^a   Rossie, B B ^a   Decker, M A ^a   Stevie, F A ^b  

^a AGERE SYSTEMS   (United States)

^b NORTH CAROLINA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0036412131     PISSN: 14319276     EISSN: None     Source Type: Journal    
DOI: 10.1017/s1431927602105381     Document Type: Conference Paper

References (2)

1. R. von Criegern, I Weitzel, and J. Fortner, Secondary Ion Mass Spectrometry, SIMS IV, edited by A. Benninghoven, J. Okano, R. Shimizu, and H. W. Werner, Springer, Berlin, 1984, 308.
2. F. A. Stevie, J. Vac. Sci. Technol. B10 (1992) 323.