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Volumn , Issue 1, 2002, Pages 95-106
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High-sensitive ellipsometric method of temperature monitoring
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Author keywords
[No Author keywords available]
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Indexed keywords
HETEROJUNCTIONS;
MONITORING;
SEMICONDUCTING GALLIUM ARSENIDE;
SEMICONDUCTING TELLURIUM COMPOUNDS;
TEMPERATURE;
HIGH SENSITIVITY;
ELLIPSOMETRY;
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EID: 0036409894
PISSN: 03207102
EISSN: None
Source Type: Journal
DOI: None Document Type: Article |
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Times cited : (2)
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References (26)
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