Integrated Bragg gratings in silicon-on-insulator waveguides

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4640, Issue , 2002, Pages 117-124

  Aalto, Timo ^a   Yliniemi, Sanna ^a   Heimala, Päivi ^a   Pekko, Panu ^a   Simonen, Janne ^b   Kuittinen, Markku ^b  

^a VTT TECHNICAL RESEARCH CENTRE OF FINLAND   (Finland)

^b UNIVERSITY OF EASTERN FINLAND   (Finland)

Author keywords

Grating; ICP etching; Integrated optics; Ridge waveguide; Silicon on insulator; SOI

Indexed keywords

BRAGG CELLS; ELECTRIC PROPERTIES; ETCHING; INDUCTIVELY COUPLED PLASMA; INTEGRATED OPTICS; OPTICAL WAVEGUIDES; REFRACTIVE INDEX; SILICON ON INSULATOR TECHNOLOGY; THERMAL EFFECTS;

BRAGG GRATING STRUCTURE; INTEGRATED BRAGG GRATINGS; OPTICAL RECEIVING; SILICON-ON-INSULATOR WAVEGUIDES;

DIFFRACTION GRATINGS;

EID: 0036408249     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.433242     Document Type: Article

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