Microfabricated interferometer and integrated fluidic channel for infrared spectroscopy of aqueous samples

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4626, Issue , 2002, Pages 411-420

  Srivastava, R ^a   Shenoy, G ^a   Forrest, S ^a   Chinnayelka, S ^a   Besser, R S ^a   McShane, M J ^a  

^a LOUISIANA TECH UNIVERSITY   (United States)

Author keywords

Electrostatic actuation; Fabry Perot interferometer; Infrared spectroscopy; Microfabrication

Indexed keywords

BIOMEDICAL ENGINEERING; ELECTRODES; ELECTROSTATIC ACTUATORS; EVAPORATION; FABRY-PEROT INTERFEROMETERS; FINITE ELEMENT METHOD; FOURIER TRANSFORM INFRARED SPECTROSCOPY; INFRARED RADIATION; MICROMACHINING; NATURAL FREQUENCIES; POLYIMIDES; SILICON NITRIDE; STRESS ANALYSIS;

INTEGRATED FLUIDIC CHANNELS;

BIOCHEMICAL ENGINEERING;

EID: 0036405324     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.472107     Document Type: Article

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