High-current discharge pumping of ArF, F2 lasers without cathode hot spots and filament instabilities

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4747, Issue , 2002, Pages 253-260

  Treshchalov, A ^a   Lissovski, A ^a   Chikeev, E ^a  

^a UNIVERSITY OF TARTU   (Estonia)

Author keywords

Discharge stability; Electron density; Excimer laser; Explosion of cathode spots; Spectroscopic diagnostics

Indexed keywords

ATOMS; CARRIER CONCENTRATION; CATHODES; CHARGE COUPLED DEVICES; CURRENT DENSITY; ELECTRIC DISCHARGES; EXCIMER LASERS; GROUND STATE; LASER PULSES; PUMPING (LASER); SPONTANEOUS EMISSION; TEMPERATURE;

CATHODE HOT SPOTS; DISCHARGE STABILITY; EXPLOSION OF CATHODE SPOTS; FILAMENT INSTABILITIES; HIGH CURRENT DISCHARGE PUMPING; HIGHEST PULSE REPETITION RATE DISCHARGE;

GAS LASERS;

EID: 0036404655     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.460130     Document Type: Conference Paper

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