Integrated tool for fabrication of electronic components by laser direct write

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4637, Issue , 2002, Pages 369-373

  Mathews, Scott A ^a   Zhang, Chengping ^a   Kegresse, Todd ^a   Liu, David ^a  

^a Potomac Photonics Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

LASER BEAM EFFECTS; LOW TEMPERATURE EFFECTS; METALLIZING; MICROMACHINING;

ELECTRONIC COMPONENTS;

LASER OPTICS;

EID: 0036403605     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.470644     Document Type: Conference Paper

References (6)

1. Scott Mathews, Paolina Atanassova, Hugh Denham, Rohit Modi, Ray Auyeung, and Michael Duignan, "An Integrated Tool for Rapid Prototyping of Electronic Circuits Using a Laser Direct Write Technique", 2001 Fall MRS Meeting Proceedings, Symposium Q, Materials Research Society, Warrendale PA, 2001.
2. A. Piquè, D.B. Chrisey, R.C.Y. Auyeung, S. Lakeou, R. Chung, R.A. McGill, P.K. Wu, M.T. Duignan, J.M. Fitz-Gerald, and H.D. Wu, "Laser Direct Writing of Circuit Elements and Sensors", SPIE Proceedings, Vol. 3618, p.330, SPIE, Bellingham WA, 1999.
3. Scott A. Mathews, Michael T. Duignan, David N. Well, Paolina Atanassova, and Toivo Kodas, "An Integrated Tool for Fabrication of Electronic Components by Laser Direct-Write", HD International Proceedings 2001, 183-188, IMAPS, Washington DC, 2001.
4. J.M. Fitz-Gerald, A. Piquè, D.B. Chrisey, P.D. Rack, M. Zeleznik, R.C.Y. Auyeung, and S. Lakeou, "Laser direct writing of phosphor screens for high-definition displays", Applied Physics Letters, vol. 76 No. 11, 1386-1388, 2000.
5. B.R. Ringeisen, D.B. Chrisey, A. Piquè, H.D. Young, R. Modi, M. Bucaro, J. Jones-Meehan, B.J. Spargo, "Generation of mesoscopic patterns of viable Escherichia coli by ambient laser transfer", Biomaterials, 23, 161-166, 2002.
6. Gregory P. Behrmann and Michael T. Duignan, "Excimer laser micromachining for rapid fabrication of diffractive optical elements", Applied Optics, Vol. 36 No. 20, 4666-4674, 1997.