Coupled vibration of microcantilever array induced by airflow force

Journal of Vibration and Acoustics, Transactions of the ASME

Volumn 124, Issue 1, 2002, Pages 26-32

  Hosaka, Hiroshi ^a   Itao, Kiyoshi ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DAMPING; FRICTION; MICROACTUATORS; NATURAL FREQUENCIES; VIBRATIONS (MECHANICAL);

AIRFLOW FORCE; MICROCANTILEVER ARRAYS;

CANTILEVER BEAMS;

EID: 0036401869     PISSN: 10489002     EISSN: 15288927     Source Type: Journal    
DOI: 10.1115/1.1421054     Document Type: Article

References (10)

1. Ohkubo, T., Kishigami, J., Yanagisawa, K., and Kaneko, R., 1991, “Submicron Magnetizing and Its Detection Based on Point Magnetic Recording Concept,” IEEE Trans. Magn., 27, pp. 5286-5288.
2. Itoh, T., Azumi, R., and Suga, T., 1997, “Piezoelectric Microcantilever Array for Multiprobe Scanning Force Microscopy,” IEICE Trans. Electron., E80-C, pp. 269-273.
3. Sampsell, J. B., 1993, “The Digital Micromirror Device and Its Application to Projection Displays,” Proc. 7th Int. Conf. Solid-State Sensors and Actuators, Yokohama, pp. 24-27.
4. Hosaka, H., Kuwano, H., and Yanagisawa, K., 1993, “Electromagnetic Microrelays: Concepts and Fundamental Characteristics,” Proc. IEEE MEMS Workshop, Fort Lauderdale, pp. 12-17.
5. Blom, F. R., Bouwstra, S., Elwenspoek, M., and Fluitman, J. H. J., 1992, “Dependence of the Quality Factor of Micromachined Silicon Beam Resonators on Pressure and Geometry,” J. Vac. Sci. Technol. B, B10, pp. 19-26.
6. Terasawa, T., Kawamura, Y., Sato, K., and Tanaka, S., 1988, “Pressure Dependent Dynamic Characteristics of Miniature Silicon Oscillator,” Bull. JSME, 22, pp. 49-54.
7. Kokubun, K., Murakami, H., Toda, Y., and Ono, M., 1984, “A Bending and Stretching Mode Crystal Oscillator as Friction Vacuum Gauge,” Vacuum, 34, pp. 731-735.
8. Hosaka, H., and Itao, K., 1999, “Theoretical and Experimental Study on Airflow Damping of Vibrating Microcantilevers,” ASME J. Vibr. Acoust., 121, pp. 64-69.
9. Lamb, H., 1945, Hydrodynamics, 6th edition, Dover Publications, New York, p. 605.
10. Landau, L. D., and Lifshits, E. M., 1959, Fluid Mechanics, Pergamon Press, London, p. 95.