Molecular dynamics simulation of structural characteristics in metal cluster deposition on surfaces

Surface and Coatings Technology

Volumn 158-159, Issue , 2002, Pages 263-268

  Wang, Y X ^a   Pan, Z Y ^a,b   Xu, Y ^a,b   Huang, Z ^a,b   Du, A J ^a,b   Ho, Y K ^a  

^a FUDAN UNIVERSITY   (China)

^b SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY   (China)

Author keywords

Energetic metal cluster deposition; Metal surface; Molecular dynamics simulation; Structure characteristic

Indexed keywords

ALUMINUM; DEPOSITION; GOLD; METALLIC FILMS; MOLECULAR DYNAMICS; NANOSTRUCTURED MATERIALS;

IMPACT ENERGY;

COPPER;

MOLECULAR STRUCTURE;

EID: 0036396833     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(02)00283-9     Document Type: Article

References (14)