Deposition of multi-period low-emissivity filters for display application by RF magnetron sputtering

Surface and Coatings Technology

Volumn 158-159, Issue , 2002, Pages 477-481

  Lee, J H ^a   Lee, S H ^a   Yoo, K L ^a   Kim, N Y ^a   Hwangbo, C K ^a  

^a Inha University   (South Korea)

Author keywords

AES; Low emmisivity; Multi layer; SEM; Silver; Sputtering

Indexed keywords

DEPOSITION; MAGNETRON SPUTTERING; SCANNING ELECTRON MICROSCOPY; SPECTROPHOTOMETERS; TITANIUM OXIDES;

LOW EMISSIVITY FILTERS;

COATING TECHNIQUES;

SPUTTERING;

EID: 0036396150     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(02)00293-1     Document Type: Article

References (14)