Static spectroscopic ellipsometer based on optical frequency-domain interferometry

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4481, Issue , 2002, Pages 137-140

  Oka, Kazuhiko ^a   Kato, Takayuki ^a  

^a HOKKAIDO UNIVERSITY   (Japan)

Author keywords

Channeled spectrum; Spectroscopic ellipsometry; Thin film; White light interferometry

Indexed keywords

BIREFRINGENCE; ELLIPSOMETRY; INTERFEROMETRY; LIGHT MODULATION; SPECTROSCOPIC ANALYSIS; THIN FILMS;

SPECTROSCOPIC ELLIPSOMETERS;

LIGHT POLARIZATION;

EID: 0036395425     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.452883     Document Type: Conference Paper

References (7)

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