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Volumn 158-159, Issue , 2002, Pages 373-376
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Preparation and properties of metal containing diamond-like carbon films by magnetron plasma ion implantation
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Author keywords
DLC; Friction; PSII; XPS
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Indexed keywords
AUGER ELECTRON SPECTROSCOPY;
COMPOSITION;
ION IMPLANTATION;
MAGNETRON SPUTTERING;
PLASMA SOURCES;
RAMAN SPECTROSCOPY;
SCANNING ELECTRON MICROSCOPY;
SILICON WAFERS;
SUBSTRATES;
TRIBOLOGY;
WEAR RESISTANCE;
X RAY DIFFRACTION ANALYSIS;
X RAY PHOTOELECTRON SPECTROSCOPY;
DISCHARGE CHAMBERS;
DIAMOND LIKE CARBON FILMS;
CORROSION RESISTANCE;
DIAMOND-LIKE CARBON;
FILM;
FRICTION;
HARDNESS;
ION IMPLANTATION;
PLASMA TREATMENT;
WEAR RESISTANCE;
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EID: 0036394592
PISSN: 02578972
EISSN: None
Source Type: Journal
DOI: 10.1016/S0257-8972(02)00323-7 Document Type: Article |
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Times cited : (30)
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References (10)
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