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Surface and Coatings Technology

Volumn 158-159, Issue , 2002, Pages 694-698

Effect of chlorine distribution profiles on tribological properties for chlorine-implanted titanium nitride films

(2) Mitsuo, A a Aizawa, T b

a TOKYO METROPOLITAN INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE (Japan)

b UNIVERSITY OF TOKYO (Japan)

Author keywords

Chlorine ion implantation; Distribution profile; Friction coefficient; Titanium nitride; Wear

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; ION IMPLANTATION; TOOL STEEL; TRANSMISSION ELECTRON MICROSCOPY; WEAR OF MATERIALS; X RAY DIFFRACTION;

CHLORINE DISTRIBUTION PROFILES;

TRIBOLOGY;

CHLORINE; FILM; FRICTION; ION IMPLANTATION; TRIBOLOGY; WEAR;

EID: 0036394518 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/S0257-8972(02)00246-3 Document Type: Article

Times cited : (10)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.