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Volumn 158-159, Issue , 2002, Pages 214-218

Electronic-loss induced ion beam mixing in various materials studied using SIMS technique

Author keywords

Electronic loss; Ion beam mixing; SIMS

Indexed keywords

DIFFUSION; IONS; IRRADIATION; MULTILAYERS; SECONDARY ION MASS SPECTROMETRY; SILICON; THIN FILMS; TITANIUM;

EID: 0036394275     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(02)00210-4     Document Type: Article
Times cited : (11)

References (19)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.