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Volumn 158-159, Issue , 2002, Pages 214-218
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Electronic-loss induced ion beam mixing in various materials studied using SIMS technique
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Author keywords
Electronic loss; Ion beam mixing; SIMS
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Indexed keywords
DIFFUSION;
IONS;
IRRADIATION;
MULTILAYERS;
SECONDARY ION MASS SPECTROMETRY;
SILICON;
THIN FILMS;
TITANIUM;
ELECTRONIC LOSSES;
ION IRRADIATION;
ION BEAMS;
NITRIDING;
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EID: 0036394275
PISSN: 02578972
EISSN: None
Source Type: Journal
DOI: 10.1016/S0257-8972(02)00210-4 Document Type: Article |
Times cited : (11)
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References (19)
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