|
Volumn 4411, Issue , 2002, Pages 106-111
|
The Zeeko/UCL process for polishing large lenses and prisms
a,b b b b b b a a,b a |
Author keywords
[No Author keywords available]
|
Indexed keywords
COMPUTER CONTROL SYSTEMS;
INTERFEROMETERS;
MOTION CONTROL;
OPTICAL INSTRUMENT LENSES;
POLISHING;
POLISHING MACHINES;
PRISMS;
ROBOTIC ARMS;
SILICON WAFERS;
TEXTURES;
OPTICS INDUSTRY;
PRECISION SURFACES;
SURFACE GENERATION;
ASPHERICS;
|
EID: 0036393339
PISSN: 0277786X
EISSN: None
Source Type: Journal
DOI: 10.1117/12.454877 Document Type: Article |
Times cited : (40)
|
References (6)
|