Development of laser turning using femtosecond laser ablation

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4426, Issue , 2002, Pages 90-93

  Yokotani, Atsushi ^a   Kawahara, Kousuke ^a   Kurogi, Yasunobu ^a   Matsuo, Naoyuki ^a   Sawada, Hiroshi ^a,b   Kurosawa, Kou ^a  

^a UNIVERSITY OF MIYAZAKI   (Japan)

^b NEC CORPORATION   (Japan)

Author keywords

Femtosecond laser; Laser ablation; Laser micromachining; Melting point; Thermal conductivity

Indexed keywords

LASER APPLICATIONS; LASER PULSES; MELTING; MICROMACHINING; PEELING; THERMAL CONDUCTIVITY; THERMAL EFFECTS; THICKNESS MEASUREMENT;

FEMTOSECOND LASERS; LASER MICROMACHINING;

PULSED LASER DEPOSITION;

EID: 0036383167     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.456877     Document Type: Article

References (14)

1. R. Srinivasan, E. Sytcliffe and B. Bararen: Appl. Phys. Lett., 51, (1987) 1285.
2. S. Küper and M. Stuke: Appl. Phys., B 44, (1987) 199.
3. S.R. Cain, F.C. Burns, C.E. Otis and B. Bararen: J. Appl. Phys., 72, (1992) 5172.
4. H. Kumagai, K. Midorikawa, K. Toyoda, S. Nakamura, T. Okamoto and M. Obara: Appl. Phys. Lett., 65, (1994) 1850.
5. Z. Bor, R. Racz, G. Szabo, D. Xenakis, C. Kalpouzos and C. Fotakis: Appl. Phys., A 60, (1995) 365.
6. S. Küper and M. Stuke: Appl. Phys. Lett., 54, (1989) 4.
7. S.Preyss, M. Spath, Y. Zhang and M. Stuke: Appl. Phys. Lett., 62, (1993) 3049.
8. S. Nakamura, K. Midorikawa, H. Kumagai, M. Obara and K. Toyoda: Jpn. J. Appl. Phys., 35, (1996) 101.
9. J. Ihlemann, B. Wolff and P. Simon: Appl. Phys., A54, (1992) 363.
10. B. Wolff-Rottke, J. Ihlemann, H. Schmit and A. Scholl: Appl. Phys., A60, (1995) 13.
11. B.C. Stuart, M.D. Feit, A.M. Rubenchik, B.W. Shore and M.D. Perry: Phys. Rev. Lett., 74, (1995) 2248.
12. J. Ihlemann, A. Scholl, H. Schmit and B. Wolff-Rottke: Appl. Phys., A60, (1995) 411.
13. Makoto Murai, Tomokazu Sano and Isamu Miyamoto: Proc. 51st Laser Materials Processing Conference, Tokyo, 2000, pp.44.
14. K. Kawahara, Y. Kurogi, N. Matsuo, H. Sawada, A. Yokotani and K. Kurosawa: reported in this issue.