A kHz and low debris capillary discharge EUV source

IEEE International Conference on Plasma Science

Volumn , Issue , 2002, Pages 157-

  Fleurier, C ^a   Robert, E ^a   Gonthiez, T ^a   Sarroukh, O ^a   Thomann, A L ^a   Viladrosa, R ^a   Pouvesle, J M ^a   Cachoncinlle, C ^a  

^a UNIVERSITÉ D'ORLÉANS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; CERAMIC MATERIALS; ENERGY CONVERSION; IMAGING TECHNIQUES; LITHOGRAPHY; MICROSCOPIC EXAMINATION; PHOTONS; PLASMA DIAGNOSTICS; RADIATION; REFLECTOMETERS; X RAY PHOTOELECTRON SPECTROSCOPY; XENON;

CERAMICS CAPILLARY; PINHOLE IMAGING; TIME INTEGRATED SPECTROSCOPY; XENON DISCHARGE PLASMA;

PLASMAS;

EID: 0036360928     PISSN: 07309244     EISSN: None     Source Type: Journal    
DOI: 10.1109/PLASMA.2002.1030356     Document Type: Article

References (0)