Reactive coevaporation of SrTiO3 thin films for tunable microwave devices

Materials Research Society Symposium - Proceedings

Volumn 688, Issue , 2002, Pages 211-216

  Peng, Luke S J ^a   Heining, Nina F ^a   Moeckly, Brian H ^a  

^a Conductus Inc ^*  (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITION; DIELECTRIC PROPERTIES; ELECTRIC FIELD EFFECTS; ENERGY DISPERSIVE SPECTROSCOPY; EVAPORATION; FERROELECTRIC THIN FILMS; FILM GROWTH; LANTHANUM COMPOUNDS; MICROWAVE DEVICES; RUTHERFORD BACKSCATTERING SPECTROSCOPY; TUNING; X RAY DIFFRACTION ANALYSIS;

DEPOSITION TEMPERATURE; ELECTRON DISPERSIVE X RAY SPECTROSCOPY; LOSS TANGENT; OXYGEN POCKET PRESSURE; REACTIVE COEVAPORATION; TUNABILITY;

STRONTIUM COMPOUNDS;

EID: 0036353938     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)