CFD analysis on a vortex enhanced CVD reactor design

Materials Research Society Symposium - Proceedings

Volumn 706, Issue , 2002, Pages 61-66

  Kuwana, Kazunori ^a   Andrews, Rodney ^a   Grulke, Eric A ^a   Saito, Kozo ^a  

^a UNIVERSITY OF KENTUCKY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; COMPUTATIONAL FLUID DYNAMICS; COMPUTER SIMULATION; ELECTRON EMISSION; HEAT TRANSFER; MASS TRANSFER;

FLOW-INJECTION; SUBSTRATE GEOMETRY;

CARBON NANOTUBES;

EID: 0036352376     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)