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Volumn 138-139, Issue 138/3-4,139/1-4, 2002, Pages 265-274
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Energy dispersive x-ray spectrometry by microcalorimetry for the SEM
a
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Author keywords
Energy dispersive X ray spectrometry; Microanalysis; Microcalorimeter; Scanning electron microscopy; Transition edge sensor
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Indexed keywords
CONDUCTANCE;
CONFERENCE PAPER;
ELECTRON BEAM;
ENERGY;
FEEDBACK SYSTEM;
MEASUREMENT;
MICROCALORIMETRY;
SCANNING ELECTRON MICROSCOPY;
SENSOR;
TEMPERATURE DEPENDENCE;
X RAY SPECTROMETRY;
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EID: 0036317719
PISSN: 00263672
EISSN: None
Source Type: Journal
DOI: 10.1007/s006040200030 Document Type: Conference Paper |
Times cited : (6)
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References (13)
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