Highly transparent tin oxide films prepared by DC magnetron sputtering and its liquid crystal display application

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 41, Issue 1, 2002, Pages 237-240

  Kim, Jin Yeol ^a   Kim, Eung Ryul ^a   Han, Yang Kyoo ^b   Nam, Kei Hyun ^c   Ihm, Dae Woo ^d  

^a Hanyang University   (South Korea)

^b Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

^c SRI INTERNATIONAL   (United States)

^d Hoseo University   (South Korea)

Author keywords

Multilayer thin film; Plastic LCD; Roll sputtering; Tin oxide

Indexed keywords

DIFFUSION; ELECTRIC CONDUCTIVITY; ELECTRIC RESISTANCE; ELECTRODES; FLAT PANEL DISPLAYS; LIGHT TRANSMISSION; LIQUID CRYSTAL DISPLAYS; MAGNETRON SPUTTERING; NUCLEATION; OXYGEN; REFRACTIVE INDEX; SEMICONDUCTING TIN COMPOUNDS;

ROLL SPUTTERING;

THIN FILMS;

EID: 0036309812     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/JJAP.41.237     Document Type: Article

References (11)