Measurement of temperature rise of quartz plate during synchrotron radiation irradiation using infrared camera

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 41, Issue 1, 2002, Pages 393-398

  Chiba, Akira ^a   Oizumi, Hiroaki ^a   Yamanashi, Hiromasa ^a   Hoko, Hiromasa ^a   Nishiyama, Iwao ^a   Ogawa, Tarou ^a   Okazaki, Shinji ^a  

^a ASSOCIATION OF SUPER ADVANCED ELECTRONICS TECHNOLOGIES ASET   (Japan)

Author keywords

Beam line; EUVL; IR; Quartz; Sapphire; Simulation; Synchrotron radiation; Temperature rise

Indexed keywords

COMPUTER SIMULATION; INFRARED RADIATION; LITHOGRAPHY; QUARTZ APPLICATIONS; SAPPHIRE; SYNCHROTRON RADIATION;

QUARTZ PLATES;

TEMPERATURE MEASUREMENT;

EID: 0036305390     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/JJAP.41.393     Document Type: Article

References (4)