Design, double sided post-processing, and packaging of CMOS compatible Bio-MEMS device arrays

Proceedings - IEEE International Symposium on Circuits and Systems

Volumn 1, Issue , 2002, Pages

  Blain Christen, Jennifer M ^a   Davis, Cristina E ^a   Li, Min ^a   Andreou, Andreas G ^a  

^a Johns Hopkins University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; ELECTRONICS PACKAGING; INTEGRATED CIRCUIT LAYOUT; MICROELECTROMECHANICAL DEVICES; MICROELECTRONIC PROCESSING;

CMOS CHIPS; ELECTRICAL SIMULATION; OPTICAL SIMULATION;

CMOS INTEGRATED CIRCUITS;

EID: 0036286897     PISSN: 02714310     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)

1. An analog VLSI chip with asynchronous interface for auditory feature extraction
2. ID polarization contrast retina
3. Controlled pulse-etching with xenon difluoride
4. Gas phase pulse etching of silicon for MEMS with xenon difluoride