Measurement of Spatial Distributions of Electron Density and Electron Temperature in Direct Current Glow Discharge by Double Langmuir Probes

Plasma Chemistry and Plasma Processing

Volumn 22, Issue 2, 2002, Pages 297-311

  Tao, Wei Han ^a   Yasuda, Hirotsugu K ^b  

^a CHINESE CULTURE UNIVERSITY   (Taiwan)

^b University of Missouri   (United States)

Author keywords

Double Langmuir probe; Electron density; Electron temperature; Glow discharge; Plasma diagnostic

Indexed keywords

CARRIER CONCENTRATION; GLOW DISCHARGES; IMPACT IONIZATION; PLASMA PROBES;

ELECTRON TEMPERATURE;

PLASMA DIAGNOSTICS;

EID: 0036255746     PISSN: 02724324     EISSN: None     Source Type: Journal    
DOI: 10.1023/A:1014803711271     Document Type: Article

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