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Journal of the Electrochemical Society

Volumn 149, Issue 1, 2002, Pages

Direct liquid injection metallorganic chemical vapor deposition of ZrO2 thin films using Zr(dmae)4 as a novel precursor

(4) Na, Jeong Seok a Kim, Dae Hwan a Yong, Kijung a Rhee, Shi Woo a

a Pohang University of Science and Technology (POSTECH) (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

BOND STRENGTH (CHEMICAL); DIFFERENTIAL SCANNING CALORIMETRY; MASS SPECTROMETRY; METALLORGANIC CHEMICAL VAPOR DEPOSITION; MORPHOLOGY; NUCLEAR MAGNETIC RESONANCE; SURFACES; THERMOGRAVIMETRIC ANALYSIS; THIN FILMS; ZIRCONIA;

METALLORGANIC PRECURSORS;

ELECTROCHEMISTRY;

EID: 0036226874 PISSN: 00134651 EISSN: None Source Type: Journal
DOI: 10.1149/1.1421605 Document Type: Article

Times cited : (26)

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