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Journal of the Electrochemical Society

Volumn 149, Issue 1, 2002, Pages

Evolution of copper-oxide damascene structures in chemical mechanical polishing: I. Contact mechanics modeling

(3) Lai, Jiun Yu a Saka, Nannaji a Chun, Jung Hoon a

a Massachusetts Institute of Technology Cambridge (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL MECHANICAL POLISHING; LITHOGRAPHY; MATHEMATICAL MODELS; SURFACE TOPOGRAPHY;

PATTERN PLANARIZATION;

COPPER OXIDES;

EID: 0036223189 PISSN: 00134651 EISSN: None Source Type: Journal
DOI: 10.1149/1.1420707 Document Type: Article

Times cited : (43)

References (25)

1
- 0028516105
- (1994) J. Electrochem. Soc. , vol.141 , pp. 2842
- Steigerwald, J.M.¹ Zirpoli, R.² Murarka, S.P.³ Price, D.⁴ Gutmann, R.J.⁵

2
- 0008814114
- (1993) MRS Bull. , vol.18 , pp. 46
- Murarka, S.P.¹ Steigerwald, J.² Gutmann, R.J.³

3
- 0000143732
- Santa Clara, CA
- (1999) Proceedings of 4th International Chemical-Mechanical for ULSI Multilevel Interconnection Conference: CMP-MIC , pp. 184
- Park, T.¹ Tugbawa, T.² Boning, D.³ Chung, J.⁴ Hymes, S.⁵ Muralidhar, R.⁶ Wilks, B.⁷ Smekalin, K.⁸ Bersuker, G.⁹

4
- 0008812964
- R. L. Opila, C. R. Simpson, K. B. Sundaram, I. Ali, Y. A. Arimoto, and Y. Homma, Editors, PV 99-37,The Electrochemical Society Proceedings Series, Pennington, NJ
- (1999) Chemical Mechanical Polishing IC Device Manufacturing III , pp. 94
- Park, T.¹ Tugbawa, T.² Boning, D.³ Hymes, S.⁴ Brown, T.⁵ Smekalin, K.⁶ Schwartz, G.⁷

5
- 0002978729
- Santa Clara, CA
- (1999) Proceedings of 4th International Chemical-Mechanical for ULSI Multilevel Interconnection Conference: CMP-MIC , pp. 423
- Pan, J.T.¹ Li, P.² Kapila, W.³ Tsai, S.⁴ Redeker, F.⁵ Park, T.⁶ Tugbawa, T.⁷ Boning, D.⁸

6
- 0026204737
- (1991) J. Electrochem. Soc. , vol.138 , pp. 2398
- Warnock, J.¹

7
- 84888254408
- (1991) Proceedings of the 8th International VLSI Multilevel Interconnection Conference: VMIC , pp. 379
- Burke, P.A.¹

8
- 0028465918
- (1994) J. Electrochem. Soc. , vol.141 , pp. 1900
- Runnels, S.R.¹

9
- 0000528977
- (1996) J. Electron. Mater. , vol.25 , pp. 1574
- Runnels, S.R.¹

10
- 0030286341
- (1996) J. Electrochem. Soc. , vol.143 , pp. 3718
- Boyd, J.M.¹ Ellul, J.P.²

11
- 0002066448
- Santa Clam, CA
- (1997) Proceedings of 2nd International Conference on Chemical-Mechanical Polishing for ULSI Multilevel Interconnection CMP-MIC , pp. 266
- Stine, B.¹ Ouma, D.² Divecha, R.³ Boning, D.⁴ Chung, J.⁵ Hetherington, D.⁶ Ali, I.⁷ Shinn, G.⁸ Clark, J.⁹ Nakagawa, O.S.¹⁰ Oh, S.-Y.¹¹

12
- 2942561344
- Society of Photo-optical Instrument Engineering
- (1997) Proceedings of SPIE Microelectronics Manufacturing Conference , pp. 236
- Ouma, D.¹ Stine, B.² Divecha, R.³ Boning, D.⁴ Chung, J.⁵ Shinn, G.⁶ Ali, I.⁷ Clark, J.⁸

13
- 0001971127
- Santa Clara, CA
- (1999) Proceedings of 4th International Conference on Chemical-Mechanical Polishing for ULSI Multilevel Interconnection CMP-MIC , pp. 93
- Smith, T.H.¹ Fang, S.J.² Boning, D.³ Shinn, G.B.⁴ Stetani, J.A.⁵

14
- 0032099606
- (1998) J. Electrochem. Soc. , vol.145 , pp. 2100
- Chekina, O.G.¹ Keer, L.M.² Liang, H.³

15
- 0033076595
- (1999) J. Electrochem. Soc. , vol.146 , pp. 744
- Chen, D.-Z.¹ Lee, B.-S.²

16
- 0033359774
- (1999) J. Electrochem. Soc. , vol.146 , pp. 3420
- Chen, D.-Z.¹ Lee, B.-S.²

17
- 0001611894
- (1927) J. Soc. Glass Technol. , vol.11 , pp. 214
- Preston, F.W.¹

18
- 0008829115
- Ph.D. Thesis, Massachusetts Institute of Technology, Cambridge, MA (Feb)
- (2001)
- Lai, J.Y.¹

19
- 0004278065
- Translated by H. Moss and I. N. Sneddon, Editor, North Carolina State College, Raleigh, NC
- (1961) Contact Problems in the Theory of Elasticity
- Galin, L.A.¹

20
- 85040875608
- Cambridge University Press., Cambridge
- (1985) Contact Mechanics
- Johnson, K.L.¹

21
- 0004088231
- Almqvist and Wiksells, Stockholm
- (1946) Electric Contacts
- Holm, R.¹

22
- 13344270633
- (1958) J. Appl. Phys. , vol.24 , pp. 981
- Archard, A.J.G.¹

23
- 0000150293
- (1962) Wear , vol.5 , pp. 114
- Goddard, J.¹ Wilman, H.²

24
- 0018492365
- (1979) Wear , vol.55 , pp. 163
- Sin, H.-C.¹ Saka, N.² Suh, N.P.³

25
- 0021789460
- (1985) ASME J. Tribol. , vol.107 , pp. 452
- Komvopoulos, K.¹ Saka, N.² Suh, N.P.³

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.