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Volumn 68, Issue 4, 2002, Pages 1548-1555

Analysis of bacteria contaminating ultrapure water in industrial systems

Author keywords

[No Author keywords available]

Indexed keywords

BACTERIA; INDUSTRIAL PLANTS; MICROSCOPIC EXAMINATION; SEMICONDUCTOR MATERIALS; WATER POLLUTION;

EID: 0036209009     PISSN: 00992240     EISSN: None     Source Type: Journal    
DOI: 10.1128/AEM.68.4.1548-1555.2002     Document Type: Article
Times cited : (187)

References (39)
  • 1
    • 0003333266 scopus 로고    scopus 로고
    • Standard test methods for microbiological monitoring of water used for processing electron and microelectronic devices by direct pressure tap sampling valve and by the presterilized plastic bag method (F-1094)
    • American Society for Testing and Materials, West Conshohocken, Pa.
    • (2000) Annual Book of ASTM Standards , pp. 287-290
  • 2
    • 0003353721 scopus 로고    scopus 로고
    • Standard guide for ultrapure water used in the electronics and semiconductor industry (D-5127)
    • American Society for Testing and Materials, West Conshohocken, Pa.
    • (2000) Annual Book of ASTM Standards , pp. 495-499
  • 7
  • 11
    • 0026797620 scopus 로고
    • Sanitization or sterilization? It depends on the final use for the high-purity water
    • (1992) Ultrapure Water , vol.9 , pp. 15-21
    • Henley, M.1
  • 19
    • 0022765067 scopus 로고
    • Relationship among turbidity, particle counts, and bacteriological quality within water distribution lines
    • (1986) Water Res. , vol.20 , pp. 1023-1029
    • McCoy, W.F.1    Olson, B.H.2
  • 33
    • 0002820351 scopus 로고
    • Measurement of microbes and particulates in ultrapure water and chemicals for the electronic industry
    • English Translation
    • (1983) Semiconductor World , vol.1983 , pp. 1-20
    • Tsuchizaki, M.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.