A thermopneumatic microfluidic system

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2002, Pages 24-27

  Grosjean, Charles ^a   Yang, Xing ^a   Tai, Yu Chong ^a  

^a California Institute of Technology   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACRYLICS; ACTUATORS; AIR; FABRICATION; FLUIDIC DEVICES; PNEUMATIC EQUIPMENT; POLYMERIC MEMBRANES; REACTIVE ION ETCHING; RUBBER; SUBSTRATES;

DEEP REACTIVE ION ETCHING; MICROFLUIDIC SYSTEM; SILICONE RUBBER MEMBRANE; THERMOPNEUMATIC ACTUATION;

MICROELECTROMECHANICAL DEVICES;

EID: 0036198839     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (2)

1. A thermopneumatic peristaltic micropump
2. Finite element modeling of a microhotplate for microfluidic applications