Fabrication and performance testing of a steady thermocapillary pump with no moving parts

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2002, Pages 100-112

  DeBar, Michael J ^a   Liepmann, Dorian ^b  

^a EASTMAN KODAK COMPANY   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FLOW OF FLUIDS; INTERFACES (MATERIALS); PRESSURE MEASUREMENT; PUMPS; SILICON; SURFACE TENSION; THERMAL GRADIENTS;

MARANGONI EFFECT; QUASI STEADY FLOW; THERMOCAPILLARY PUMP; VAPOR BUBBLE;

MICROELECTROMECHANICAL DEVICES;

EID: 0036194428     PISSN: 10846999     EISSN: None     Source Type: Journal    
DOI: 10.1109/MEMSYS.2002.984216     Document Type: Article

References (3)

1. The motion of bubbles in a vertical temperature gradient
2. Control of fluids in microscale devices
3. Planar laminar mixer